Greenhouse gas emission reduction product Booster pump for SF6 gas recovery
Electron beam processing system (EPS) uses SF6 gas for insulation of the power supply unit, and it is inevitable that a small amount of SF6 gas is released into the atmosphere during gas recovery during maintenance. By using a booster pump, the amount of SF6 gas released into the atmosphere can be significantly reduced, and the recovery time can also be significantly shortened. This is both environmentally friendly and leads to more efficient maintenance work.
Outline specification table
| Supply voltage | 3phase 200~220V 50/60Hz | |
|---|---|---|
| Vacuum pump power | 2.2 kW | |
| Mating flange | JIS10K50A | |
| Self-running line pressure | 0.7 MPa | |
| Outline size | Width | 620 mm |
| Length | 950 mm | |
| Height | 980 mm | |
| Weight | About 220 kg | |
â– Effectiveness
(measured when recovered in a tank of approx. 20 m3)
- Reduction of atmospheric emissions (unrecovered)
-
- 5kg
- 1.7kg
(reduction of approximately 80 tons of carbon dioxide equivalent)
- Reduced vacuum recovery time
-
- 12hours
- 3hours
